Сhemical and structure transition in  metallic films under influence of electrons

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Title	Сhemical and structure transition in metallic films under influence of electrons
Authors	Chornous, Anatolii Mykolaiovych Shovkoplias, Oksana Anatoliivna Ovcharenko, Yurii Mykhailovych Protsenko, Ivan Yukhymovych
ORCID	http://orcid.org/0000-0002-5009-5445 http://orcid.org/0000-0002-4596-2524 http://orcid.org/0000-0003-3351-9303
Keywords	metallic films металлические пленки металеві плівки
Type	Article
Date of Issue	1997
URI	http://essuir.sumdu.edu.ua/handle/123456789/840
Publisher	Technical University of Lublin
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Citation	Сhemical and structure transition in metallic films under influence of electrons [Text] / I. Protsenko, O. Shovkoplyas, A. Chornous, Y. Ovcharenko // Ion implantation of science and technology (IIST`97) : international symposium, 22-24 January, 1997. - P. 160-164.
Abstract	Results of investigation of structure and chemical transition in films Sc, Y and Cr at thermal annealing in vacuum chamber and when heating the films with an electron beam directly and microscope are performed. Was received, what chemical composition of films at prolonged annealing was the same as and at annealing an electron beam. We draw a conclusion that Sc203 is formed from metastable Sc, which is not observed in massive Sc. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/840
Appears in Collections:	Наукові видання (ЕлІТ)