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| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2011 | Optical monitoring of technological processes for fabrication of thin-film nanostructures | Luk'yanov, A.Yu.; Volkov, P.V.; Goryunov, A.V.; Daniltsev, V.M.; Pryakhin, D.A.; Tertyshnik, A.D.; Khrykin, O.I.; Shashkin, V.I. | Conference Papers | 7486390 | 18761434 |